A novel tunable band-pass filter based on a single square-ring MEMS resonator

摘要

This paper reports a new MEMS resonator comprising of four identical beams connected at right angles in a square ring and utilizes the tuning of two neighbouring modes to construct a single resonator band-pass filter. A novel frequency tuning mechanism is introduced to accurately control the bandwidth and centre frequency. A representative measurement demonstrates continuous shift of the centre frequency and 3dB-bandwidth from 594.825 KHz to 595.180 KHz and from 1.02 KHz to 0.55 KHz, respectively, by varying DC bias voltages from ?20 V to +20 V and the average ripple is 2.37 dB.